TY  - BOOK
AU  - Glendinning, William B., jt. ed.
AU  - Helbert, John N., jt. ed.
TI  - Handbook of VLSI microlithography : principles, technology, and applications
SN  - 9788179928998
U1  - 621.381531 HEL-J 
PY  - 1991///
CY  - India
PB  - Jaico Book
KW  - Microlithography
KW  - Integrated circuits --Very large scale integration. ﾠ
N1  -  Materials science and process technology series
ER  -