Plummer, James D. <br/><br/>
Silicon VLSI technology : fundamentals, practice, and modeling/ 
James D. Plummer, Michael Deal, and Peter B. Griffin 
 - India  Pearson Education  2001 
 - 817 p. 
<br/><br/> 	<br/>This text provides an integrated view of silicon technology, with an emphasis on modern computer simulation. It describes both the manufacturing process associated with the technologies used in slicon chip fabrication and their scientific basis.  
<br/><br/><label>ISBN: </label>9788131726044 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Silicon-on-insulator technology.<br/>Metal oxide semiconductors. ﾠ<br/>Silicon oxide films. ﾠ<br/>Silicon. ﾠ<br/>Integrated circuits --Very large scale integration --Design and construction. ﾠ
<br/><br/><label>Dewey Class. No.: </label>621.395 PLU-J